Compact vacuum spin coater with oilless vacuum pump CY-EZ4
CY-EZ4 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via
sol-gel for wafers up to 4" diameter.The spinning speed is variable from 100-10000rpm with two programmable segments
1.75w brushless dc motor,single chip microcomputer control
2.High-definition display
3.Pre-set single or multi-step coating operate
4.Prevent glue blocking design
5.PP anti- corrosion chamber, replaceable
6.HDPE vacuum adhesive disc




Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized
lab equipment.Welcome you come to visit us.

CY-EZ4 is CE certified compact spin coater with vacuum chucks designed for easy and quick coating via
sol-gel for wafers up to 4" diameter.The spinning speed is variable from 100-10000rpm with two programmable segments
1.75w brushless dc motor,single chip microcomputer control
2.High-definition display
3.Pre-set single or multi-step coating operate
4.Prevent glue blocking design
5.PP anti- corrosion chamber, replaceable
6.HDPE vacuum adhesive disc
Model No. | EZ4 |
Chamber dimension | 200mm |
Maximum sample | 10mm-100mm |
Speed range | 100~9999rpm adjustable |
Accelerated speed | 100~9999rpm/s |
Speed resolution | 1rpm |
Speed accuracy | < 5rpm |
Control | 5 sets programmable control,each sets with 5 steps |
Motor power | Brushless DC Motor 75w |
Working voltage | AC 110-220V, 50Hz |
Outer dimension | 250*210*200mm |




Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized
lab equipment.Welcome you come to visit us.
